VALMORIA, Nico et al. Synthesis of ZrN Film Via the Plasma Sputter-Type Negative Ion Source. Science Diliman: A Journal of Pure and Applied Sciences, [S.l.], v. 11, n. 2, sep. 2007. ISSN 2012-0818. Available at: <https://journals.upd.edu.ph/index.php/sciencediliman/article/view/242>. Date accessed: 02 sep. 2025.