MANAY, R. L.; 						ABELLANA, V. Y.; 						SARMAGO, R. V..
 Silicon Nitride (SiNxHy) by Plasma-Enhanced Chemical Vapor Deposition.
<strong>Science Diliman: A Journal of Pure and Applied Sciences</strong>, [S.l.], v. 13, n. 2, july 2012.
ISSN 2012-0818.
Available at: &lt;<a href="https://journals.upd.edu.ph/index.php/sciencediliman/article/view/177" target="_new">https://journals.upd.edu.ph/index.php/sciencediliman/article/view/177</a>&gt;. Date accessed: 06 aug. 2025.