Measurement of Microscopic Deformations Using Double-Exposure Holographic Interferometry and the Fourier Transform Method
AbstractMicroscopic deformations on the surface of a circular diaphragm were measured using double exposure holographic interferometry and Fourier transform method (FTM). The three-dimensional surface deformations were successfully visualized by applying FTM to holographic interferogram analysis. The minimum surface displacement measured was 0.317 µm. This was calibrated via the Michelson interferometry technique.
holographic interferometry; microscopic deformation measurement; Fourier transfonn method; double-exposure method; hologram; laser application
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